US Patent Issued to LAM RESEARCH on July 28 for "Automated cleaning of robot arms of substrate processing systems" (California Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,595, issued on July 28, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Automated cleaning of robot arms of substrate processing systems" was invented by Hossein Sadeghi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a plurality of inlets configured to dispense a gas into an enclosure of a substrate processing system. The enclosure is separate from processing chambers of the substrate processing system that process a semiconductor substrate. The system includes a controller configured to move into the enclosure a robot arm used to transport the semiconductor substrate between the processing chambers of the ...