ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,532,675, issued on Jan. 20, was assigned to Lam Research Corp. (Fremont, Calif.).
"Core removal" was invented by Sivananda Krishnan Kanakasabapathy (Pleasanton, Calif.), Akhil Singhal (Beaverton, Ore.), Alan J. Jensen (Mountain House, Calif.), Seongjun Heo (Dublin, Calif.), Nishat Hasan (Portland, Ore.) and Srividya Revuru (West Linn, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods, apparatus, and systems are provided herein for processing a substrate. Generally, the processing involves Spacer-on-Spacer (SoS) Self-Aligned Quadruple Patterning (SAQP) techniques. The disclosed techniques provide a novel process flow that reduces defects by ens...