ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,350, issued on Feb. 24, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).
"Moveable edge rings for plasma processing systems" was invented by Christopher Kimball (San Jose, Calif.), Darrell Ehrlich (San Jose, Calif.) and Yuma Ohkura (San Mateo, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A moveable edge ring system for a substrate processing system includes a top moveable ring including a first annular body arranged around a substrate support. The top moveable ring is exposed to plasma during substrate processing. A moveable support ring is arranged below the top moveable ring and radially outside of a baseplate of the substrate suppor...