US Patent Issued to LAM RESEARCH on Feb. 24 for "Linear arrangement for substrate processing tools" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,562,356, issued on Feb. 24, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Linear arrangement for substrate processing tools" was invented by Danny Arthur Brown (Pleasanton, Calif.), Brian Mwenze Bradley (San Francisco), Marissa Elena Ortiz (San Jose, Calif.), Michael C. Kellogg (Oakland, Calif.), Emil Nenov (Sunnyvale, Calif.), Kevin Luong (San Jose, Calif.) and Christopher J. Pena (Hayward, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes a vacuum transfer module and a plurality of process modules defining respective processing chambers. The plurality of process modules includes a first row of the pr...