ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,641, issued on Feb. 10, was assigned to Lam Research Corp. (Fremont, Calif.).
"Generating a low-temperature substrate protective layer" was invented by Jeremiah Christopher Chuck (Castro Valley, Calif.), Jordan Yu (Oakland, Calif.) and Xiuqi Fang (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for depositing protective layers on a surface of a substrate includes conducting a plurality of ALD cycles in a first reaction chamber to deposit a first protective layer on the substrate. Each ALD cycle of the plurality of ALD cycles is conducted at a deposition temperature below about 100deg C. and includes delivering a first precurs...