US Patent Issued to Lam Research on Dec. 23 for "Tunability of edge plasma density for tilt control" (California, Texas Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,505,991, issued on Dec. 23, was assigned to Lam Research Corp. (Fremont, Calif.).

"Tunability of edge plasma density for tilt control" was invented by John Holland (San Jose, Calif.), Stephan K. Piotrowski (San Jose, Calif.), Jaewon Kim (Fremont, Calif.), Pratik Mankidy (Fremont, Calif.), Takumi Yanagawa (Fremont, Calif.), Dongjun Wu (San Jose, Calif.), Anthony De La Llera (Fremont, Calif.) and Zehua Jin (Houston).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma lining structure is used in a process chamber to block direct line-of-sight for plasma generated within to grounded surface. The plasma lining structure includes a plurality of sections to...