US Patent Issued to Lam Research on Dec. 2 for "Wafer handling robot with gravitational field sensor" (California Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,485,554, issued on Dec. 2, was assigned to Lam Research Corp. (Fremont, Calif.).

"Wafer handling robot with gravitational field sensor" was invented by Richard M. Blank (San Jose, Calif.), Marco Piccigallo (Livermore, Calif.), Eric Chan (San Francisco) and Arulselvam Simon Jeyapalan (Newark, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are techniques and systems for automatically determining and correcting the levelness of a wafer handling robot end effector. The systems may use a tilt sensor or a gravitational field sensor which may be calibrated to the wafer handling robot. The output from the tilt sensor may be used to determine or ...