US Patent Issued to LAM RESEARCH on Dec. 16 for "Method of mounting wires to substrate support ceramic" (California, Hawaii Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,069, issued on Dec. 16, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Method of mounting wires to substrate support ceramic" was invented by Oleksandr Mikhnenko (San Diego) and Quan Chau (Kamuela, Hawaii).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly includes a baseplate, a ceramic plate arranged on the baseplate, and a plurality of wires. The ceramic plate includes a plurality of slots arranged on a side facing the baseplate and a plurality of electrically conducting terminals disposed in the plurality of slots, respectively. Each of the terminals includes a base portion connected to the ceramic plate, a second...