US Patent Issued to Lam Research on Dec. 16 for "Edge rings providing kinematic coupling and corresponding substrate processing systems" (California Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,068, issued on Dec. 16, was assigned to Lam Research Corp. (Fremont, Calif.).

"Edge rings providing kinematic coupling and corresponding substrate processing systems" was invented by Alejandro Sanchez (Mountain View, Calif.), Grayson Ford (San Jose, Calif.), Darrell Ehrlich (San Jose, Calif.), Aravind Alwan (Milpitas, Calif.), Kevin Leung (Dublin, Calif.), Anthony Contreras (Stockton, Calif.), Zhumin Han (Fremont, Calif.), Raphael Casaes (Alameda, Calif.) and Joanna Wu (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or m...