ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,709,797, issued on Aug. 18, was assigned to Lam Research Corp. (Fremont, Calif.).
"Methods of selective deposition and chemical delivery systems" was invented by Kashish Sharma (Tigard, Ore.), Nupur Bihari (Tualatin, Ore.), Benjamin Edwards (Fremont, Calif.), Arpan Pravin Mahorowala (West Linn, Ore.), Avinash Gouda Doddamani (Bellary District, India), Ashwin Kumar (Bangalore, India) and Avinash Jaiswal (Bangalore, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods of selectively depositing metal oxide on an exposed metal surface relative to a dielectric material on a substrate by pre-treatment with a hydroxy species-generating plas...