US Patent Issued to LAM RESEARCH on April 7 for "Purging spindle arms to prevent deposition and wafer sliding" (Oregon Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,948, issued on April 7, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Purging spindle arms to prevent deposition and wafer sliding" was invented by Prasanna Kulkarni (Tigard, Ore.), Huatan Qiu (Portland, Ore.), Brian Joseph Williams (Tigard, Ore.) and Ted Tan (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a plurality of spindle arms located above a plurality of stations in a processing chamber to transport a semiconductor substrate between the stations. The spindle arms reside in the processing chamber during processing of the semiconductor substrate. The system comprises first gas lines arranged below the...