US Patent Issued to LAM RESEARCH on April 14 for "Carrier ring for floating TCP chamber gas plate" (California Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,257, issued on April 14, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Carrier ring for floating TCP chamber gas plate" was invented by Gordon Peng (San Jose, Calif.), Ambarish Chhatre (Danville, Calif.), Craig Rosslee (San Jose, Calif.), Dan Marohl (San Jose, Calif.) and David Setton (Danville, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas distribution assembly for a processing chamber in a substrate processing system includes a gas plate including a plurality of holes configured to supply a gas mixture into an interior of the processing chamber and a carrier ring configured to support the gas plate. The carrier ring include...