US Patent Issued to Lam Research on April 14 for "Apparatuses and techniques for cleaning a multi-station semiconductor processing chamber" (California, Oregon Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,263, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.).

"Apparatuses and techniques for cleaning a multi-station semiconductor processing chamber" was invented by Xin Meng (Ontario, Calif.), Xinyi Chen (Beaverton, Ore.), Sreeram Sonti (San Diego), Kevin Bertsch (Tigard, Ore.), Defu Liang (Wilsonville, Ore.), Zhuozhi Chen (Fremont, Calif.), Rohit Ode (Portland, Ore.), William Schlosser (Tigard, Ore.), Tongtong Guo (Beaverton, Ore.) and Rachel E. Batzer (Tigard, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for redirecting cleaning chemistry flows within a multi-station semiconductor processing chamber...