US Patent Issued to KYOCERA Technologies on Sept. 22 for "MEMS resonator" (Finnish Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,514, issued on Sept. 22, was assigned to KYOCERA Technologies Oy (Espoo, Finland).

"MEMS resonator" was invented by Eric Sage (Espoo, Finland), Aarne Oja (Espoo, Finland) and Hannu Vesterinen (Espoo, Finland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS (microelectromechanical system) resonator assembly (100), comprising a support structure (102), a resonator element (101) suspended to the support structure (102), and an actuator for exciting the resonator element (101) to a resonance mode. The resonator element (101) comprises two bulk acoustic resonators (110a, 110b) and a flexural mode resonator (120). The flexural mode resonator (120) m...