US Patent Issued to KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION on Aug. 25 for "Cryogenic electrostatic chuck system and method for controlling same" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,102, issued on Aug. 25, was assigned to KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION (Seoul, South Korea).

"Cryogenic electrostatic chuck system and method for controlling same" was invented by Gi Chung Kwon (Seongnam-si, South Korea), Hee Tae Kwon (Bucheon-si, South Korea), Ji Hwan Kim (Goyang-si, South Korea), Woo Jae Kim (Gimpo-si, South Korea) and In Young Bang (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cryogenic electrostatic chuck system and a method for controlling the same according to a preferred embodiment of the present invention is capable of performing a cryogenic process for a substrate, suc...