US Patent Issued to KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY on Sept. 8 for "Plasma-resistant ceramic substrate and method of manufacturing the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,729,163, issued on Sept. 8, was assigned to KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY (Jinju-si, South Korea).

"Plasma-resistant ceramic substrate and method of manufacturing the same" was invented by Sung Min Lee (Seoul, South Korea), Yoon Suk Oh (Seoul, South Korea), Hyeong Jun Kim (Cheonan-si, South Korea) and Gyusang Oh (Geoje-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a plasma-resistant ceramic substrate including a bulk of an oxide composition; and a surface layer in which an oxide composition component constituting the bulk was modified to a composition including one or more anions se...