US Patent Issued to Kokusai Electric on March 3 for "Temperature control method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,423, issued on March 3, was assigned to Kokusai Electric Corp. (Tokyo).

"Temperature control method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus" was invented by Hideto Yamaguchi (Toyama, Japan), Masaaki Ueno (Toyama, Japan), Seiya Shigematsu (Toyama, Japan), Masashi Sugishita (Toyama, Japan) and Shuhei Maeda (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted tem...