US Patent Issued to Kokusai Electric on Feb. 10 for "Substrate processing apparatus, switching method, method of manufacturing semiconductor device, and recording medium" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,162, issued on Feb. 10, was assigned to Kokusai Electric Corp. (Tokyo).

"Substrate processing apparatus, switching method, method of manufacturing semiconductor device, and recording medium" was invented by Susumu Nishiura (Toyama, Japan) and Hajime Abiko (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes at least one load port capable of mounting a substrate storage container that stores a substrate, a controller configured to be capable of performing: a switching control to switch a first function of using the at least one load port to load or unload the substrate storage container and a secon...