US Patent Issued to Kokusai Electric on Dec. 23 for "Substrate processing apparatus and non-transitory computer-readable recording medium" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,503,770, issued on Dec. 23, was assigned to Kokusai Electric Corp. (Tokyo).

"Substrate processing apparatus and non-transitory computer-readable recording medium" was invented by Masashi Sugishita (Toyama, Japan) and Masaaki Ueno (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a heater heating a substrate in a reaction tube; a temperature controller controlling the heater; a valve controller adjusting an opening degree of a control valve to adjust a gas flow rate; and a main controller instructing a recipe inclu...