ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,552,659, issued on Feb. 17, was assigned to Knowles Electronics LLC (Itasca, Ill.).
"MEMS die and MEMS-based sensor" was invented by Michael Pedersen (Long Grove, Ill.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Various implementations of MEMS sensors include an IC die having a cavity that forms at least part of the back volume of the sensor. This arrangement helps to address the problems of lateral velocity gradients and viscosity-induced losses. In some of the embodiments, the cavity is specially configured (e.g., with pillars, channels, and/or rings) to reduce the lateral movement of air. Other solutions (used in conjunction with such cavities) in...