ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,497,283, issued on Dec. 16, was assigned to Knowles Electronics LLC (Itasca, Ill.).
"MEMS die and MEMS-based sensor" was invented by Peter V. Loeppert (Durand, Ill.), Michael Pedersen (Long Grove, Ill.) and Vahid Naderyan (Chicago).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micro-electro-mechanical systems (MEMS) die includes a piston; an electrode facing the piston, wherein a capacitance between the piston and the electrode changes as the distance between the piston and the electrode changes; and a resilient structure (e.g., a gasket or a pleated wall) disposed between the piston and the electrode, wherein the resilient structure supports the pist...