US Patent Issued to KLA on Sept. 29 for "Method to perform in-situ vacuum contamination measurement and identification in arbitrarily large chambers" (California Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,751,233, issued on Sept. 29, was assigned to KLA Corp. (Milpitas, Calif.).

"Method to perform in-situ vacuum contamination measurement and identification in arbitrarily large chambers" was invented by Santosh Kumar Sankar (San Jose, Calif.) and Makfir Sefa (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The system includes a primary vacuum chamber and a secondary vacuum chamber connected to the primary vacuum chamber via a gate valve. The gate valve operates between an open position in which the secondary vacuum chamber is in fluid communication with the primary vacuum chamber and a closed position in which the secondary vacuum chamber...