ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,752,312, issued on Oct. 6, was assigned to KLA Corp. (Milpitas, Calif.).
"Optical table cleaning devices and methods of cleaning optical tables" was invented by HongBo Si (Ann Arbor, Mich.), Tara Chan (Ann Arbor, Mich.), Christopher Tourek (Ann Arbor, Mich.), John Szilagyi (Dexter, Mich.), Jaejung Kim (Seoul, South Korea), Alberto Daniel Aguilar (Newburgh, Ind.), Sergio Alejandro Perez (Powder Springs, Ga.), Qiyue Ma (Atlanta), Yohanes Tezera (Clarkston, Ga.), Marco Antonio Marquez (Cartersville, Ga.), Jennifer Carol Wolfe (Flat Rock, N.C.), Luke Dague (Hyndman, Pa.), Denzel Carter (Naples, Fla.), Adriano Alessandro Bayz (Washington), Claire Elizabeth Mackes (Crofton, Md.) and Stacy Ma...