US Patent Issued to KLA on Oct. 27 for "Apparatus, method and computer program product for defect detection in work pieces" (Belgian Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,775,039, issued on Oct. 27, was assigned to KLA Corp. (Milpitas, Calif.).

"Apparatus, method and computer program product for defect detection in work pieces" was invented by Tom Marivoet (Erps-Kwerps, Belgium), Carl Truyens (Rotselaar, Belgium) and Christophe Wouters (Balen, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a ...