US Patent Issued to KLA on March 31 for "System and method for enhancing defect detection in optical characterization systems using a digital filter" (California Inventor)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,963, issued on March 31, was assigned to KLA Corp. (Milpitas, Calif.).

"System and method for enhancing defect detection in optical characterization systems using a digital filter" was invented by Pavel Kolchin (Livermore, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for enhancing defect detection in optical characterization systems using a digital filter is disclosed. The system may include a controller including one or more processors configured to execute a set of program instructions. The set of program instructions may be configured to cause the one or more processors to: acquire one or more sample images, the one or more sam...