US Patent Issued to KLA on June 23 for "System and method for monitoring parameters of a semiconductor factory automation system" (Israeli, American Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,666,931, issued on June 23, was assigned to KLA Corp. (Milpitas, Calif.).

"System and method for monitoring parameters of a semiconductor factory automation system" was invented by Mor Azarya (Moshavmerhalj, Israel), Michael D. Brain (Los Gatos, Calif.), Ami Appelbaum (Los Gatos, Calif.), Shai Mark (Kibutz Snir, Israel) and Arie Hoffman (Kiryat Tivon, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates inclu...