US Patent Issued to KLA on June 23 for "Interface-based defect inspection using second harmonic generation" (California Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,664,641, issued on June 23, was assigned to KLA Corp. (Milpitas, Calif.).

"Interface-based defect inspection using second harmonic generation" was invented by Qiang Zhao (Milpitas, Calif.) and Ming Di (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection system may perform an inspection recipe by receiving reference SHG images of a reference structure based on a scan of the reference structure with an illumination beam and collecting second harmonic generation (SHG) light in response to the illumination beam, where the reference structure includes a multilayer structure including one or more inversion-symmetric materials. The ...