US Patent Issued to KLA on July 28 for "Multi-spot laser-sustained plasma light source" (German, American Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,079, issued on July 28, was assigned to KLA Corp. (Milpitas, Calif.).

"Multi-spot laser-sustained plasma light source" was invented by Alexander Buettner (Weilburg, Germany), Vahid Esfandyarpour (San Jose, Calif.) and Tobias Mueller (Weilburg, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An LSP broadband light source is disclosed. The LSP broadband light source may include a pump source configured to generate a pump beam and one or more collimating optical elements configured to collimate the pump beam into a collimated pump beam. The light source may include one or more focusing optical elements and a beamsplitter located at a conjugate p...