US Patent Issued to KLA on July 28 for "Interpretable deep learning-based defect detection and classification" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,694,280, issued on July 28, was assigned to KLA Corp. (Milpitas, Calif.).

"Interpretable deep learning-based defect detection and classification" was invented by Xu Zhang (Milpitas, Calif.), Li He (San Jose, Calif.) and Sankar Venkataraman (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An explanation of a detection/classification algorithm made using a deep learning neural network clarifies the results that are formed and helps a user to identify the root cause of defect detection/classification model performance issues. A relevance map is determined based on a layer-wise relevance propagation algorithm. A mean intersection over union ...