US Patent Issued to KLA on July 28 for "Diffraction-based illumination sampling" (German Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,155, issued on July 28, was assigned to KLA Corp. (Milpitas, Calif.).

"Diffraction-based illumination sampling" was invented by Florian Melsheimer (Cologne, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An illumination system may include an optical homogenizer to homogenize a beam of light and a grating positioned in a path for the homogenized beam of light, to diffract light from the homogenized beam. The illumination system also includes a detector to receive light diffracted by the grating and to measure a power of the received light. The grating is disposed, for example, on an inner surface of the optical homogenizer or on a surface of ...