US Patent Issued to KLA on July 14 for "Soft x-ray optics with improved filtering" (Texas, California Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,680,968, issued on July 14, was assigned to KLA Corp. (Milpitas, Calif.).

"Soft x-ray optics with improved filtering" was invented by Alexander Kuznetsov (Austin, Texas), Boxue Chen (San Jose, Calif.) and Nikolay Artemiev (Berkeley, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Optical elements that efficiently propagate x-ray radiation over a desired energy range and reject radiation outside the desired energy range are presented herein. In one aspect, one or more optical elements of an x-ray based system include an integrated optical filter including one or more material layers that absorb radiation having energy outside the desired energy ban...