ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,431, issued on Jan. 27, was assigned to KLA Corp. (Milpitas, Calif.).
"Sample inspection with multiple measurement modes" was invented by Guoheng Zhao (Palo Alto, Calif.), Bret Whiteside (Gilroy, Calif.), Daniel Kavaldjiev (San Jose, Calif.), Zhiwei Xu (Sunnyvale, Calif.) and Stephen Biellak (Sunnyvale, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection system may include an illumination source configured to generate an illumination beam with multiple wavelengths, an illumination sub-system including one or more illumination optics to direct the illumination beam to a sample at an off-axis angle, and an imaging sub-system. The syste...