US Patent Issued to KLA on Jan. 27 for "Laser-sustained plasma generation in supersonic gas jets" (Russian, American Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,408, issued on Jan. 27, was assigned to KLA Corp. (Milpitas, Calif.).

"Laser-sustained plasma generation in supersonic gas jets" was invented by Oleg Khodykin (Santa Cruz, Calif.), Boris Korneev (Milpitas, Calif.), Ilya Bezel (Mountain View, Calif.), Andrey Zakirov (Milpitas, Calif.), Andrey Evgenievich Stepanov (Moscow), Vitaliy Rerikh (Milpitas, Calif.) and Leonid Borisovich Zvedenuk (Moscov, Russia).

According to the abstract* released by the U.S. Patent & Trademark Office: "A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate su...