ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,698, issued on Aug. 18, was assigned to KLA Corp. (Milpitas, Calif.).
"Methods for measurement of rAIM" was invented by Yoel Feler (Haifa, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "An overlay metrology system may receive an image of an overlay target on a sample in accordance with a metrology recipe, wherein the image is generated by illuminating via oblique illumination an overlay target comprising a plurality of Moire structures with one or more pairs of illumination beams, wherein portions of the image associated with one or more Moire structures of the plurality of Moire structures having periodicity along a measurement direction are...