US Patent Issued to KLA on Aug. 11 for "Flexible measurement models for model based measurements of semiconductor structures" (Chinese, American Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,789, issued on Aug. 11, was assigned to KLA Corp. (Milpitas, Calif.).

"Flexible measurement models for model based measurements of semiconductor structures" was invented by Houssam Chouaib (Milpitas, Calif.), Tianrong Zhan (Shanghai), Jonathan Iloreta (Menlo Park, Calif.), Teng Gu (Shanghai) and Andrei V. Shchegrov (Los Gatos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for generating measurement models of complex semiconductor structures based on re-useable, parametric models are presented herein. In some embodiments, the re-useable, parametric models enable measurement of high aspect ratio (HAR) structures having comp...