ALEXANDRIA, Va., April 7 -- United States Patent no. 12,596,855, issued on April 7, was assigned to KLA Corp. (Milpitas, Calif.).
"System and method for accelerating physical simulation models during microelectronic device fabrication" was invented by Yiting Zhang (Fremont, Calif.) and Ankur A. Agarwal (Newark, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for accelerating physical simulation models during microelectronic device fabrication may include, but is not limited to, running a physical simulation model at a first grid size having a first resolution, generating outputs at the first grid size having the first resolution from the physical simulation model, inputting the outputs at the ...