US Patent Issued to KLA Coporation on July 7 for "System and method for acquiring alignment measurements of structures of a bonded sample" (American, German, Israeli Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,674,662, issued on July 7, was assigned to KLA Coporation (Milpitas, Calif.).

"System and method for acquiring alignment measurements of structures of a bonded sample" was invented by Nimrod Shuall (Beaverton, Ore.), Jordan Pio (Milpitas, Calif.), Frank Laske (Weilburg, Germany), Stefan Eyring (Weilburg, Germany) and Ohad Bachar (Timrat, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for acquiring measurements of structures of a bonded sample are disclosed. Such systems and methods may include determining a first registration measurement of a first registration structure and a first interface target structure of a first sample,...