ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,542, issued on Aug. 11, was assigned to Kethley Instruments LLC (Solon, Ohio).
"MEMS device measurements using pulse measure unit" was invented by Jin Kwang Yu (Hudson, Ohio) and Alexander N. Pronin (Twinsburg, Ohio).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems of testing microelectromechanical (MEMS) devices are disclosed. A method includes mechanically coupling a wafer including MEMS devices to a test system and electrically coupling one of the MEMS devices through a probe card to a pulse measure unit (PMU) of the test system. The method includes driving, through the PMU, drive nodes of the MEMS device with an applied time-var...