ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,488,449, issued on Dec. 2, was assigned to Kateeva Inc. (Newark, Calif.).
"Analysis of material layers on surfaces, and related systems and methods" was invented by Doris Pik-Yiu Chun (Santa Cruz, Calif.) and Ian David Parker (Santa Barbara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of analyzing film on a substrate comprises receiving surface profile data obtained from measurements of a substrate having a plurality of discrete regions with one or more film layers; extracting, based on a predetermined pattern of the discrete regions, a plurality of parameters from the received surface profile data, the plurality of parameters comprisi...