ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,745, issued on Jan. 27, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea).
"Substrate transfer method and substrate transfer device" was invented by Gu Hyun Jung (Gwangju-si, South Korea), Jong Chul Kim (Gwangju-si, South Korea), Jin An Jung (Gwangju-si, South Korea), Chul Joo Hwang (Gwangju-si, South Korea) and Yeong Seop Byeon (Gwangju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a substrate transfer method and apparatus which controls a substrate transfer robot using position information of a substrate, when the substrate is loaded or unloaded in the substrate transfer apparatus includin...