ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,802, issued on Jan. 27, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea).
"Substrate processing method" was invented by Cheong Son (Gwangju-si, South Korea), Jae Sung Roh (Gwangju-si, South Korea), Hong Min Yoon (Gwangju-si, South Korea), Hong Soo Yoon (Gwangju-si, South Korea), Youn Joo Jang (Gwangju-si, South Korea), Ji Hyun Cho (Gwangju-si, South Korea), Se Whan Jin (Gwangju-si, South Korea) and Chul Joo Hwang (Gwangju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present inventive concept is a substrate processing method in which processing steps are carried out on a substrate supported on a support unit in a proces...