US Patent Issued to JIANGSU LEUVEN INSTRUMENTS on Jan. 20 for "Plasma processing system and multi-section faraday shielding device thereof" (Chinese Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,531,215, issued on Jan. 20, was assigned to JIANGSU LEUVEN INSTRUMENTS Co. LTD (Xuzhou, China).

"Plasma processing system and multi-section faraday shielding device thereof" was invented by Haiyang Liu (Jiangsu, China), Xiaobo Liu (Jiangsu, China), Dongdong Hu (Jiangsu, China), Na Li (Jiangsu, China), Shiran Cheng (Jiangsu, China), Song Guo (Jiangsu, China), Zhihao Wu (Jiangsu, China) and Kaidong Xu (Jiangsu, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "A Faraday shielding device includes an electrically conductive ring and a plurality of electrically conductive petal-shaped assemblies radially and symmetrically on the periphery of the electrica...