US Patent Issued to JEOL on April 7 for "Charged particle beam apparatus" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,582, issued on April 7, was assigned to JEOL Ltd. (Tokyo).

"Charged particle beam apparatus" was invented by Kenichi Tsutsumi (Tokyo), Tatsuya Uchida (Tokyo), Kazushiro Yokouchi (Tokyo), Nobuyuki Ikeo (Tokyo) and Konomi Ikita (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam apparatus that forms a probe with a charged particle beam and scans a specimen with the probe to acquire a scanning image. The charged particle beam apparatus includes an optical system for scanning the specimen with the probe; a detector that detects a signal generated from the specimen through the scanning of the specimen with the probe; and a contr...