ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,491, issued on May 19, was assigned to International Business Machines Corp. (Armonk, N.Y.).
"Replacement buried power rail" was invented by Ruilong Xie (Niskayuna, N.Y.), Stuart Sieg (Albany, N.Y.), Somnath Ghosh (Clifton Park, N.Y.), Kisik Choi (Watervliet, N.Y.) and Kevin Shawn Petrarca (Newburgh, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein describe a semiconductor structure. The semiconductor structure may include a device region with a first source/drain (S/D) and a second S/D. The semiconductor structure may also include a buried power rail (BPR) under the device region. A critical dimension of the BPR may b...