ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,514, issued on May 19, was assigned to INTERNATIONAL BUSINESS MACHINES Corp. (Armonk, N.Y.).
"Metal insulator metal capacitor (MIM capacitor)" was invented by Chanro Park (Clifton Park, N.Y.), Ruilong Xie (Niskayuna, N.Y.), Julien Frougier (Albany, N.Y.), Chih-Chao Yang (Glenmont, N.Y.), Ashim Dutta (Clifton Park, N.Y.) and Shravana Kumar Katakam (Lehi, Utah).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device including a metal insulator metal capacitor (MIM capacitor) within back end of line circuitry, where a bottom electrode of the MIM capacitor includes a plurality of vertical pillars extending up from a bottom layer. A semicondu...