US Patent Issued to International Business Machines on May 19 for "Fork sheet with reduced coupling effect" (New York, Connecticut Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,241, issued on May 19, was assigned to International Business Machines Corp. (Armonk, N.Y.).

"Fork sheet with reduced coupling effect" was invented by Ruilong Xie (Niskayuna, N.Y.), Chun-Chen Yeh (Danbury, Conn.), Heng Wu (Guilderland, N.Y.) and Alexander Reznicek (Troy, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Fork sheet FET devices with airgap isolation are provided. In one aspect, a fork sheet FET device includes: at least a first nanosheet FET and a second nanosheet FET; and a dielectric pillar disposed directly between the first nanosheet FET and the second nanosheet FET, wherein the dielectric pillar includes an airgap. For instance,...