US Patent Issued to International Business Machines on July 7 for "Frontside ILD optimization for backside power distribution network" (New York Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,453, issued on July 7, was assigned to International Business Machines Corp. (Armonk, N.Y.).

"Frontside ILD optimization for backside power distribution network" was invented by Haojun Zhang (Schenectady, N.Y.), Ruilong Xie (Niskayuna, N.Y.), Oleg Gluschenkov (Tannersville, N.Y.) and Nicolas Jean Loubet (Guilderland, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor structure containing optimized frontside interlayer dielectrics (ILDs) for a direct backside contact based backside power distribution network is provided. Notably, the frontside ILD materials that are present in the semiconductor structure are optimized such that a fron...