ALEXANDRIA, Va., July 14 -- United States Patent no. 12,684,873, issued on July 14, was assigned to International Business Machines Corp. (Armonk, N.Y.).
"Self-aligned backside interconnect structures" was invented by Ruilong Xie (Niskayuna, N.Y.), Brent A. Anderson (Jericho, Vt.), Albert M. Chu (Nashua, N.H.), Lawrence A. Clevenger (Saratoga Springs, N.Y.), Nicholas Anthony Lanzillo (Wynantskill, N.Y.), Reinaldo Vega (Mahopac, N.Y.) and David Wolpert (Poughkeepsie, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor structure includes a first plurality of backside power rail interconnects located within a first cell height region of a substrate. A second plurality of backside power rail inte...