US Patent Issued to Intel on Sept. 22 for "Inline circuit edit for backside power delivery with deep via" (Oregon, California Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,745,621, issued on Sept. 22, was assigned to Intel Corp. (Santa Clara, Calif.).

"Inline circuit edit for backside power delivery with deep via" was invented by Clifford J. Engel (Hillsboro, Ore.), Richard H. Livengood (San Jose, Calif.), Mauro J. Kobrinsky (Portland, Ore.), Robert L. Bristol (Portland, Ore.) and Akshit Peer (Hillsboro, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Lithographic methodologies involving, and apparatuses suitable for, inline circuit edits are described. In an example, an integrated circuit structure includes a device layer including a plurality of transistor structures. A front-end routing layer is above the device l...