ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,708, issued on June 23, was assigned to Intel Corp. (Santa Clara, Calif.).
"System and method for reducing pellicle rupture" was invented by Lance C. Hibbeler (Tillamook, Ore.), John Ferdinand Magana (San Jose, Calif.) and Chytra Pawashe (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A reinforcement system includes a framed pellicle, which includes a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the framed pellicle and the pellicle f...